Service

  • Performing of in-house calibrations (traceable to the PTB) and measurements of microstructural components
  • Measuring Instruments:
    Tactile Surface Profiler DEKTAK XTAutofokussensor AF 16
    Tactile Surface Profiler DEKTAK XTAutofokussensor AF 16
  • Preparation of standards and microstructural components according to customer wishes
  • Design of masks for the etching of silicon especially the orientation dependent wet etching
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